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Title of Thesis

Design, Fabrication And Characterization Of Metalmumps Based Mems Gyroscopes

Author(s)

Rana Iqtidar Shakoor

Institute/University/Department Details
Department Of Chemical And Materials Engineering / Pakistan Institute of Engineering and Applied Sciences, Islamabad
Session
2010
Subject
Chemical Engineering
Number of Pages
169
Keywords (Extracted from title, table of contents and abstract of thesis)
Fabrication, Characterization, Design, Metalmumps, Gyroscopes, Mems, Vibratory, Microsuspension, Microgyroscopes, Mechanical

Abstract
Not Available

Download Full Thesis
4,856 KB
S. No. Chapter Title of the Chapters Page Size (KB)
1 0 CONTENTS

 

 ix
129 KB
2

1

 INTRODUCTION

1.1 Vibratory Microgyroscopes
1.2 Classification of Vibratory Microgyroscopes
1.3 Applications of Vibratory Microgyroscopes
1.4 Development of Micromachined Gyroscope
1.5 Research Motivation
1.6 Research Objective
1.7 Outline of Dissertation

 1
348 KB
3 2 DESIGN IMPLEMENTATION OF MICROMACHINED VIBRATORY GYROSCOPES

2.1 Introduction
2.2 Dynamics of Vibratory Microgyroscope
2.3 Mechanical Design Implementation
2.4 Actuation Mechanisms
2.5 Sensing Mechanisms
2.6 Fabrication of Prototypes

23
841 KB
4 3 DOF ELECTROSTATIC MICROGYROSCOPE

3.1 3-DoF Design Concept
3.2 Prototype Modeling and Fabrication
3.3 Simulation Results
3.4 Experimental Results

 45
1,274 KB
5 4 PARAMETRIC MODELING OF MICROGYROSCOPE USING MODEL ORDER REDUCTION

4.1 Introduction
4.2 System Model Extraction (SME)
4.3 Simulation Methodology

 71
1,385 KB
6 5 ELECTROTHERMALLY ACTUATED NON-RESONANT MICROGYROSCOPE

5.1 Introduction
5.2 Design Concept and its Implementation
5.3 Prototype Modeling and Fabrication
5.4 FEM Methodology

96
1,620 KB
7 6 ELECTROTHERMALLY ACTUATED RESONANT MICROGYROSCOPE

6.1 Introduction
6.2 Microgyroscope Design and Simulations
6.3 Prototype Fabrication
6.4 Implementation and Test Results
6.5 Experimental Evaluation

126
897 KB
8 7 CONCLUSION
7.1 Future Recommendations

 

 146
180 KB